Semiconductor Applications and Product Selector Guide | Zatkoff

DuPont™ Kalrez® Parts for the Semiconductor Industry

Kalrez® perfluoroelastomer parts have been used successfully in highly aggressive sealing environments for over 30 years. Kalrez® parts combine the resilience and sealing force characteristics of an elastomer with the chemical inertness and thermal stability of DuPont™ Teflon® fluoropolymer resin. DuPont offers molded O-rings and custom seals using a series of specialty products and ultrapure processing for the semiconductor industry. DuPont™ Kalrez® UltraPure™ parts have excellent chemical and thermal stability and have been specially formulated and processed to meet the unique requirements of wafer processing environments.

Chemical and Thermal Resistance

Kalrez® seals resist attack by over 1,800 chemicals including reactive gases and plasmas, alkalis, acids and solvents. Even in contact with these corrosive chemicals, Kalrez® seals retain their elastomeric properties at temperatures as high as 325 °C. DuPont has over 30 years experience in perfluoroelastomer research including polymer development, compounding, and parts manufacturing. As the sealing needs of the semiconductor industry have evolved, this experience has enabled DuPont to introduce new products that continue to increase seal life and reduce process contamination levels.

Ultrapure Processing Reduces Residual Contamination

Ultrapure post-cleaning and packaging is performed on Kalrez® parts as a secondary operation in a Class 100 clean room. Parts are cleaned using a proprietary process, followed by multiple rinses in UPDI water, and then dried under a filtered air stream. The parts are sealed in certified-clean, antistatic packaging material and shipped double-bagged, permitting easy clean room use by OEMs and fablines.

Ultrapure processing is standard for Kalrez® 9100, Kalrez® 9300, Kalrez® 9500, Kalrez® 8002, Kalrez® 8085, Kalrez® 8900, Kalrez® 8475 and Kalrez® 6375UP. It is optional for Kalrez® 1050LF. For these products, ultrapure processing can be specified by adding a “UP” suffix to the product designation (e.g., Kalrez® 1050UP).