Semiconductor Seals Brochure | Zatkoff

Semiconductor Seals Brochure

Semiconductor Seals Brochure


Description

Purity is critical to high wafer yield. As a consequence, reducing contamination from particulates, outgassing and extractables caused by seal deterioration are all major goals for semiconductor fabricators. Manufacturers gain seal reliability and process purity when they rely on DuPont™ Kalrez® perfluoroelastomer parts.

Whether it’s etching, ashing/stripping, deposition, oxidation, diffusion furnace or “wet” processes, Kalrez® parts are field-proven in the manufacture of semiconductor chips. In a number of evaluations at fabline customers, Kalrez® parts exhibited improved mechanical strength, lower particle generation and longer seal life versus competitive perfluoroelastomers in both static and dynamic sealing applications.
© Zatkoff Seals & Packings 2021. All Rights Reserved.