Description
Purity is critical to high wafer yield. As a
consequence, reducing contamination
from particulates, outgassing and
extractables caused by seal deterioration
are all major goals for semiconductor
fabricators. Manufacturers gain
seal reliability and process purity
when they rely on DuPont™ Kalrez®
perfluoroelastomer parts.
Whether it’s etching, ashing/stripping,
deposition, oxidation, diffusion furnace
or “wet” processes, Kalrez® parts are
field-proven in the manufacture of
semiconductor chips. In a number of
evaluations at fabline customers, Kalrez®
parts exhibited improved mechanical
strength, lower particle generation
and longer seal life versus competitive
perfluoroelastomers in both static and
dynamic sealing applications.