Kalrez® Bonded Door Seals | Zatkoff

Kalrez® Bonded Door Seals

Kalrez® Bonded Door Seals


Description

Bonded door seals for gate valves and slit valve door seal applications provide improved sealing performance versus conventional O-rings by reducing particle generation, extending seal life and minimizing replacement time during preventive maintenance.

DuPont™ Kalrez® bonded door seals are designed for easy installation and low particle generation. They combine a custom seal design and proprietary adhesion technology along with the excellent plasma resistance of Kalrez® 9100, 8002, and Kalrez® Sahara™ 8085. The seal is held in a “fixed” position versus conventional O-rings, thereby eliminating “rolling/twisting” during door actuation. In addition, the seal design has been optimized using finite element analysis (FEA) to minimize high concentrations of localized stresses. As a result, both particle generation and sealing performance significantly improved versus conventional O-rings. Kalrez® bonded door seals are available in Kalrez® 9100, 8002 and Kalrez® Sahara™ 8085* for etching, ashing/stripping, HDPCVD, PECVD, SACVD, metal CVD and ALD wafer processing applications.