Description
Bonded door seals for gate valves and slit valve door seal applications provide improved
sealing performance versus conventional O-rings by reducing particle generation,
extending seal life and minimizing replacement time during preventive maintenance.
DuPont™ Kalrez® bonded door seals are designed for easy installation and low particle
generation. They combine a custom seal design and proprietary adhesion technology
along with the excellent plasma resistance of Kalrez® 9100, 8002, and Kalrez® Sahara™
8085. The seal is held in a “fixed” position versus conventional O-rings, thereby
eliminating “rolling/twisting” during door actuation. In addition, the seal design has been
optimized using finite element analysis (FEA) to minimize high concentrations of
localized stresses. As a result, both particle generation and sealing performance
significantly improved versus conventional O-rings. Kalrez® bonded door seals are
available in Kalrez® 9100, 8002 and Kalrez® Sahara™ 8085* for etching, ashing/stripping,
HDPCVD, PECVD, SACVD, metal CVD and ALD wafer processing applications.