Description
KF type flange seals provide an economical,
convenient and simplified means of constructing
vacuum systems for semiconductor applications.
Despite the efficiency offered by these flanges,
manufacturers may face premature seal failure and
unscheduled equipment downtime when standard
AS568 perfluoroelastomer O-rings are specified for
high temperature service. NW series Kalrez®
perfluoroelastomer O-rings from DuPont help to
optimize seal life and reduce down time in
semiconductor vacuum systems.